Ma Yongtao, Zhang Jianli
(School of Mechanical Engineering, Zhengzhou University, 450001)
Abstract When polish thick CVD diamond films by hot metal method polishing machine, it must work under the temperature higher than 800℃ and the vacuum circumstance. High temperature and vacuum need special demand on structure design for the polishing machine. According to the working environment of the polishing machine, the paper discussed some important aspects such as dynamic sealing, thermal protection, material selection and structure design. Moreover, some standard for the machine design were summarized. Through the experiment with the test machine, it is clearly that the standard can meet the need for the design of polishing machine. The machine can work continuously more than 1 hour under temperature of 850℃ and vacuum of 1.3*10-2 Pa, which can be used to polish thick CVD diamond films.
Keywords polishing machine CVD diamond structure design