Abstract In this paper,nanocrystalline diamond films were prepared by using CH₄/H₂,CH₄/H₂/Ar with different concentration in electron enhanced hot filament chemical vapor deposition(HFCVD)system.Scanning electron microscopy(SEM)and atom force microscopy(AFM)as well as Raman scattering spectra were employed to characterize the as-grown films.The micro-mechanical properties were measured by nano-indentation method.The uploading and downloading curves and the variety of hardness and Young's modulus with indentation depth were gained.The results showed that diamond film had a special nano-scaled structure.The higher the CH₄ and Ar gas concentration,the finer the grain size and the lower the surface roughness.

Keywords nanocrystalline diamond films;reactive gas;nano-indentation;micro-properties

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