Abstract Uniform and compact nanocrystalline diamond thin films were deposited on quartz tube substrate with the gas mixture of ethanol and hydrogen by microwave plasma CVD equipment which has a novel type of resonance cavity.The quality of diamond thin films were tested by SEM,Raman spectroscopy and XRD.A corrosion experiment was designed to test the anti-corrosion effect of diamond thin films.The results showed that when the reaction pressure is 5.5 kPa,the ethanol concentration is 8 vo lï¼…,the reaction temperature is 500 ^oC,the nanocrystalline diamond thin film could be obtained,which is able to enhance the anti-corrosion performance of quartz tube.

Keywords quartz tube;microwave plasma CVD;diamond thin film;anti-corrosion