Abstract  Outline shaping method is a conventional laser micro-drilling technology for drilling synthetic single crystal diamond.The disadvantage of this technology is that the nearer to the hole center the laser focus is,the more the removed materials are.Accordingly,it is difficult to obtain an accurate pass.Based on the theory and experiment,a new model for laser numerical conteol drlling is proposed . In the reduced area, the material is removed equally by automatic regulating of the dies’rotating speed.Furthermore,the laser pulse energy is controlled to decrease with the reduction of the aperture,which correspondingly improves the pass precision. The experimental results show that the proposed model can improve the machining precision of the dies efficiently.An aperture of 3.5 µm can be obtained.It is proved that the model proposed in this paper for diamond drilling is successful and effective for micro-nano fabrication of integrated circuit lead dies.

Keywords laser micro-drilling;synthetic single crystal diamond;new NC machining model

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