The Integration Manufacturing Technology is a kind of compound precision finishing process that combined grinding with abrasive jet finishing, in which inject slurry of abrasive and liquid solvent to grinding zone between grinding wheel and work surface under no radial feed condition when workpiece grinding were accomplished. The abrasive particles are driven and energized by the rotating grinding wheel and liquid hydrodynamic pressure and increased slurry speed between grinding wheel and work surface to achieve micro removal machining. In the paper, the surface microscopic topography by the Integration Manufacturing Technology were evaluated and analyzed. Experiments were performed with plane grinder M7120 and workpiece material 40Cr. The machined surface morphology was studied using SEM and the microscope and microcosmic geometry parameters were measured with TALYSURF5 instrument. The experimental results show that that longitudinal geometry parameter values of finishing machining surface were diminished comparing with ground surface,and the mean ripple distance was decreased and, ripple and peak density were increased. Furthermore, The finished surface has little comparability compared to grinding machining surface.The isotropy surface and uniformity veins at parallel and perpendicular machining direction were attained by the Integration Manufacturing Technology.