ABSTRACT: People make synthetic diamond film using chemical vapor deposition(CVD). But polycrystalline CVD  diamond films have rough and non-uniform thickness which can adversely affect their application. Polishing can be used to remedy these drawbacks. In recent years, many polishing techniques have been reported, each having technology advantages and disadvantages. This paper reviews the mechanical-chemical polishing of CVD diamond films. In tile mechanical lapping, the final surface is controlled by the size of the abrasive powder used In the chemical polishing, CVD diamond films is etched by molten rare earth metals such as lanthanum and cerium. The temperature of polishing plate, its material and tile atmosphere during the polishing are very important to the final surface by  thermo-chemical polishing, C11enfically assisted mechanical polishing(CAMP) is a combination technique that uses mechanical polishing in conjunction with chemicals to enhance tile remove rate. At last, we propose a new polishing technology for polishing CVD diamond film.

KEYWORDS: CVD Diamond films Polishing