Nano ceramics possessed ascendant mechanical property and physical characteristics contrast with engineering ceramics, so it has extensive application prospect in various industries. On the basis of applying the indentation fracture mechanics to analyze the removal mechanics of ceramic material, this paper analyzed the critical ductile grinding depth of the nano ZrO2 ceramics. Adopting ultrasonic composite processing we describe the influence of different processing parameters and grain size of diamond wheel on the grinding forces and surface roughness.