Fluorinated diamond-like carbon (FDLC) films were prepared by means of plasma source ion implantation (PSII) and micro-wave ECR plasma enhanced chemical vapor deposition (ECR-PECVD) with source gases of CHF3, CH4/CHF3 and C2H2/CHF3. FDLC films are compared with DLC film in construct and various properties.The paper discussed the influence of different technique parameters on FDLC films. On the base of these results, FDLC films were prepared with source gases of CH4/CHF3i by means of PSII combined with PECVD,while using DLC films prepared by PSII as interlayer between substrates and FDLC films. It was found that they had very good overall properties. This technique is the best one of all methods used in this paper.FT-IR spectroscopy, Raman spectroscopy.AES spectroscopy, AFM and so on were used to study structural properties of FDLC films.The results showed as following:Firstly, FDLC film is one of amorphous carbon and has the same construct as DLC film.Its roughness is lower than that of DLC film. Sencondly,FDLC film comprises -CH, -CH2. -CF, -CF2? -CF3 and less C=C -CFx.Thirtly,different source gases as well as different flow rates makes the construct of FDLC film different.Forthly, the highest concentration of F in FDLC film on stainless steel lies in the middle of FDLC film .meanwhile, the highest concentration of F in FDLC film lies in the surface of Si layer.The water contact angles were measured to estimate the hydrophobic property of the FDLC films. The hardness of the films was measured by an indentation method. The corrosion resistance was determined by anode polarizing curve. The results showed as following:Firstly, the contact angle of FDLC film is the biggest when the flowmeter ratio of CH4/CHF3 is 1:3, which is also bigger than that prepared with C2H2/CHF3.And the contact angle increased when micro-wave power, puls wideth ,bia voltage.working time raised and the temperature of substrate discreased.Sencondly, FDLC film has the good properties such as strong adhesion, high hardness and excellent anti-corrosion.