Diamond-like carbon films(DLC) have many excellent properties, including high wear resistance, low friction coefficient, good thermal stability, good optics capability, high electrical resistance and good biocompatibility, which make it have great prospect in many fields. Liquid phase method is a hotspot in research of diamond-like carbon films, and compare to gas phase method it is a latter technique. Liquid phase method has some virtues, including low deposition temperature, good repetition of experiment, large area proparation and advantageous industrialization. So, it is necessary to do some exploring work in this way. In this experiment, diamond-like carbon films were deposited on Si(100) and ITO-glass. The technique of this experiment was different from traditional liquid phase method.â‘ DLC films were deposited on the two kinds substrates by invariable pressure and variety pressure.â‘¡DLC films were also deposited on Si(100) which was set as anode by variety pressure technique. The characters of films, including element, configuration, appear of surface and electrics capability, were analysed after experiment. First, element analysis was done by EPMA, the result showed that the films were composed by carbon; second, the configuration was analysed by FTIR and Raman spectroscopy, and it was proved that the carbon films were a-C:H; third, the appear of surface was pictured by optics microscope and SEM and AFM, and the result showed that the appear of DLC films on ITO was more better than it on Si(100); last, the higher than 10~8Ωcm~2 resistance was done by EIS analysis, the result indicated that the DLC films were good erosion resistance layers in chemical liquid. In this article, the mechanism of electrodeposition of DLC films was deduced again.