Diamond like carbon films have many excellent properties, including high wear resistance, low friction coefficient, good thermal stability and transmission within IR range, high electrical resistance, low dielectric constant, high hydrophobicity and biocompatibility, which make it have various application and attract people"s great concern. Diamond like carbon films usually show weak adhesion to metal surface and high internal stress, it will make films peel off from metal surface, so it is the main problem need to be solved during the research in the future.In this paper, doping silicon Diamond like carbon films were deposited successfully through preparation of transition layers on silicon and stainless surface by combining MW-ECR PECVD and PVD techniques. CH4 gases, Ar gases and silicon target were used as reactant resources.The composition and structure characteristics of the fihns were determined by Fourier transform infrared spectroscopy, Raman spectroscopy and X-ray photoelectron spectroscopy. The morphology was characterized by optical and Atomic force microscopy. The hardness and modulus of films were measured by nano-indentation. The wetting and corrosion resistant properties characterized by static contact angle measurement and electrochemical impedance spectroscopy (EIS) were interpreted in terms of the surface chemistry.Raman spectroscopy indicates that the fihns show amorphous structure and typical characteristic of DLC film. With the increase of target power, Id/Ig increase gradually and G band shift to high wavenumber. Raman spectroscopy become symmetric and narrow, which shows that sp3 content increase. The incorporation of silicon leads to the decrease of internal stress and the decrease from 17.34GPa to 13.44GPa. XPS and FTIR indicate that fihns contain not only C, H, Si element, but also O element, which exist in fihns by Si-O-Ci Si-OH bond. The surface roughness is improved due to the incorporation of silicon. Stainless steel deposited fihns show moderate hydrophobicity, and corrosion resistance increases due to the effective isolation and good chemical inertness of DLC films.