For improving the qualities of diamond-like carbon (DLC) film deposited fromdielectric barrier discharge, the relations between plasma parameters and filmqualities have been studied. Firstly, CH_4 and C_2H_6 gases were used to deposit DLCfilms, and, their plasma processes were analyzed. Secondly, the effects of adding Arand He into CH_4 on plasma characteristics and the properties of DLC films depositedwere investigated by measuring the discharge power and analyzing the plasmaelectron temperature. This work reveals the relations between the plasmacharacteristics and film quality. Finally, the theoretical models of ion energy from thedepositing plasmas were established based on drift and diffuse theory. Calculatedresults show that the ion can obtain kinetic energy when traveling through electricfield to form high-quality DLC films, no bias voltage were needed during filmdeposition, thus the whole set of equipment is simple. The contents and results of thiswork are listed as follows: (1) DLC films have been deposited using CH_4 and C_2H_6 gases, and filmproperties have been compared. The results show, that soft polymer-like hydrocarbonfilms are deposited from C_2H_6 gases, and film hardness is independent on gas pressureP and discharge space d. However, at P=100Pa, d=10mm, the dense DLC films aredeposited by C_2H_6/H_2 gases. Film hardness increased from 4 to 19.5GPa withincreasing H_2 fraction from 0ï¼…to 95ï¼…. This indicates that the strong polymerizationprocess occurred in the pure C_2H_6 DBD plasma, which led to the deposition ofpolymer-like films. In contrast, the weak polymerization process occurred in pure CH_4DBD plasma. (2) The effects of Ar and He on DLC deposition were compared usingCH_4/He(Ar) mixtures at the pressure of 100 Pa, discharge space of 10 mm, and thetotal flow rate of 5 sccm. It was found that the hardness of DLC films increased from12.5GPa to 19.4 GPa with increasing the Ar fraction from 0 to 67ï¼…, and increasedfrom 2.5GPa to 23GPa with increasing He fraction from 0 to 58ï¼…. Clearly theproperties of DLC film were greatly improved by adding Ar or He into CH_4. (3) The discharge power of CH_4/He or CH_4/Ar DBD plasmas was measured, theelectron temperature was calculated from the measurement of emission opticalspectrum. The effect of Ar (He) on CH_4+Ar or CH_4+He DBD plasma wereinvestigated by measurement of discharge power and calculation of electrontemperature from emission optical spectrum. At the gas pressure of 100Pa anddischarge space of 10mm, discharge voltage of 25kV, the discharge power of CH_4/Ar decreased from 24.5 to 8.3 mW with increasing the Ar (He) fraction from 20ï¼…to 83ï¼…,while electron temperature decreased from＞6000K to＜2000K. The discharge powerof CH_4/He mixtures increased from 10mW to 23mW when the He fraction increasesfrom 18ï¼…to 67ï¼…, then decreased to＜5mW at the He fraction of 83ï¼…. The electrontemperature was found to be 7146K at the He fraction of 80ï¼…, and 9237K at Hefraction of 90ï¼…. (4) The theoretical model based on the drift and diffusion of ions in the dischargegas was used to analyze the kinetic energy of ions. The variation of ion energy withthe product of gas pressure P and discharge space d in CH_4 DBD, and the variation ofion energy with the Ar or He fraction in CH_4/Ar or CH_4／He mixtures were presented.It was found that the hydrocarbon ion energy increased from 5.4eV to 20.2eV withdecreasing the Pd value from 14 to 4.5×133Pa mm, then increased rapidly to 163eV at the Pd value of 2×133Pa mm. With increasing Ar fraction in CH_4/Ar or Hefraction in CH_4/He mixtures from 18ï¼…to 83ï¼…, the kinetic energy of hydrocarbonions increases from 69.6 (43.9) to 92.1 (128.5) eV. The high kinetic energy ofhydrocarbon ions is responsible for the deposition of dense DLC films by DBDplasmas without substrate bias. The experimental results and theoretical analysis showed that the DBD method issuitable for DLC film deposition. During film deposition, the ions can obtain, fromdischarge space electrical field, kinetic energy enough to deposit the dense DLC filmswithout substrate bias, and the total set of equipment are quite simple. Adding Ar orHe to CH_4 facilities improving the properties of DLC films through increasing thehydroncarbon ion kinetic energy. However, the mechanisms of Ar (He) affecting onDBD plasma characteristics are different. In CH_4/Ar plasma, lower breakdownvoltage leads to low ion density, low discharge power, and low electron temperature.However, due to a relatively high mass of Ar, the density of CH_n and H can beimproved through the bi-body collisions between the CH_4 and Ar or Ar~*, andstrengthened surface reaction increased the DLC film hardness. For CH_4/He mixtures,the ionization potential and sub-stable energy level of He is much higher than that ofCH_4, so the breakdown voltage is high, which leads to an increase in the electrontemperature, ionized rate, ion density, and discharge power.