With the advantages of plenty of unmatched performance in the mechanical, physical and chemical properties, diamond not only can be made for decorations, but also played an important role in technology and industry. At present, there is still a hard work to process the single crystal diamond for the diamond crystal materials with good properties of the chemical stability and the highest of hard and brittle. As the most traditional method, mechanical lapping has been widely applied in polishing diamond crystal for its simple process, low-cost and good quality. With the development of the technology and applications, the request of the surfaces of the diamond is more stringent. So to study on precision lapping technology in diamond for practical applications is a meaning thing. Based on the research results for mechanical lapping of single crystal diamond by other scholars or researchers and on experiments, the dependence of vibration in the z direction of the sample and the lapping surface quality on the technical parameters such as system flexibility, platen-jump, lapping speed and lapping pressure was investigated. Experiment results show that the effect of the vibration on the lapping quality is obvious and the elastic beam and flexible pad is good for vibration isolation. The technical parameters, including platen-jump, lapping speed and lapping pressure, play an important role in the lapping quality. All of these experiment results provide a basis for optimization parameters to improve the quality of lapping. Based on the research results for the vibration in the x direction of the sample in lapping, the friction and impact of the mechanism was also analyzed via the experiments. Experiment results show that it is mainly caused by the shock and friction of the abrasive particles and the surface of the lapping samples for the vibration in the x direction of the abrasive particles. So in this paper, the vision of increasing flexibility in the x direction as to control the shock and friction and to removal the surface material using the relatively uniform lapping force ,which is based the previous experiment results. Then, after analyzing the effectiveness and feasibility which is based on experiments, the elastic beam in previous lapping bodies is improved to obtain certain degree of flexibility both in the x direction and z direction. The experiments results show that the vibration become vibration reduces obvious and the lapping quality improved obvious after using the flexibility damping and absorber damping of the elastic beam.