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Diamond breakage on CMP pad conditioner


Post Date: 06 Oct 2008    Viewed: 1015
Liu Ping-Hsiao1, Sung James C.1,2,3,Hsu Kai-Hung1, Sung Michael4
(1.National Taipei University of Technology, Taipei 106, Taiwan)
(2.KINIK Company, 64, Chung-San Rd., Ying-Kuo, Taipei Hsien 239, Taiwan)
(3.National Taiwan University, Taipei 106, Taiwan)
(4.Advanced Diamond Solutions, Inc., 351 King Street Suite 813, San Francisco, CA 94158, U.S.A.)
Abstract Diamond grits may be thermally weakened during the high temperature cycle of brazing. This weakening may exhibit as diamond breakage. During the dressing action, taller diamond grits are more likely to break due to the higher stress present.

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